Blank Cover Image

Evaluation of Copper Penetration in Low-ｦﾊ Polymer Dielectrics by Bias-Temperature Stress

著者名:
Loke, A. L. S.
Wong, S. S.
Talwalkar, N. A.
Wetzel, J. T.
Townsend, P. H.
Tanabe, T.
Vrtis, R. N.
Zussman, M. P.
Kumar, D.
さらに 4 件
掲載資料名:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
564
発行年:
1999
開始ページ:
535
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994713 [1558994718]
言語:
英語
請求記号:
M23500/564
資料種別:
国際会議録

類似資料:

1 国際会議録 Evaluation of Copper Penetration in Low-K Polymer Dielectrics by Bias-Temperature Stress

Kumar, D., Loke, A. L. S., Talwalkar, N. A., Tanabe, T., Townsend, P. H., Vrtis, R. N., Wetzel, J. T., Wong, S. S., …

Materials Research Society
7 国際会議録 Progress Towards a Porous Polymer Low K Dielectric

P. Townsend

Electrochemical Society
2 国際会議録 Electrical Reliability of Cu and Low-K Dielectric Integration

Wong, S. Simon, Loke, Alvin L. S., Wetzel, Jeffrey T., Townsend, Paul H., Vrtis, Raymond N., Zussman, Melvin P.

MRS - Materials Research Society
8 国際会議録 Progress Towards a Porous Polymer Low K Dielectric;

Townsend, P.

Electrochemical Society
3 国際会議録 Nanoporous Silica for Low ｦﾊ Dielectrics

Ramos, Teresa, Wallace, Steve, Smith, Douglas M.

MRS - Materials Research Society
9 国際会議録 Low-Dimensional Organic Superconductors ｦﾊ-(BEDT-TTF)2Cu[N(CN)2]X, where X=Br0.5, Br0.7Cl0.3 and Br0.9I0.1

Shibaeva P. R., Khasanov S. S., Kushch D. N., Yagubskii B. E., Boubekeur K., Batail P., Canadell E.

Kluwer Academic Publishers
4 国際会議録 Structural Characterization of a Series of New Ternary ｦﾊ-Nitride Compounds

Weil, K. S., Kumta, P. N.

MRS - Materials Research Society
10 国際会議録 Extensions to the AESA for Finding ｦﾊ-Nearest-Neighbours

Aibar P., Juan A., Vidal E.

Springer
5 テクニカルペーパー A new modified low-Reynolds-number ｦﾊ-ｦﾅ model

Chen, S., Lai, J., Milthorpe, J., Mudford, N.

American Institute of Aeronautics and Astronautics
11 テクニカルペーパー Analysis of separated flows inside an annular compressor cascade using a low-re-number ｦﾊ-ｦﾅ- and an algebraic Reynolds-stress-model

Lucke, Jurgen R., Gallus, Heinz E.

The American Society of Mechanical Engineers
6 国際会議録 Electrical Extraction of the In-Plane Dielectric Constant of Fluorinated Polyimide

Loke, Alvin L. S., Wetzel, Jeffrey T., Stankus, John J., Wong, S. Simon

MRS - Materials Research Society
12 国際会議録 Particle sizes of casein submicelles and purified ｦﾊ-casein: comparison of dynamic light scattering and electron microscopy with predictive …

Farrell, H.M., Cooke, P.H., King, G., Hoagland, P.D., Groves, M.L., Kumosinski, T.F., Chu, B.

American Chemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12