Electroplated Cu Recrystallization in Damascene Structures at Elevated Temperatures

Electroplated Cu Recrystallization in Damascene Structures at Elevated Temperatures

著者名:

Jiang, Q-T.

掲載資料名:

Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

564

発行年:

1999

開始ページ:

429

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994713 [1558994718]

言語:

英語

請求記号:

M23500/564

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019849
シリーズID:	PA00000011
会議名:	Symposium on advanced interconnects and contacts
回次:	1999
会議開催地:	San Francisco, CA, USA
会議開催年:	1999.04.05-1999.04.07

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1 国際会議録 Bath Additive and Current Density Effects on Copper Electroplating Fill of Cu Damascene Structures Mikkola, R. D., Jiang, Q-T., Carpio, R., Carpenter, B. MRS - Materials Research Society	7 国際会議録 Microstructure and Texture of Electroplated Copper in Damascene Structures Gross, M. E., Lingk, C., Siegrist, T., Coleman, E., Brown, W. L., Ueno, K., Tsuchiya, Y., Itoh, N., Ritzdorf, T., … MRS - Materials Research Society
2 国際会議録 Bath Additive and Current Density Effects on Copper Electroplating Fill of Cu Damascene Structures Carpenter, B., Carpio, R., Jiang, Q-T., Mikkola, R. D. Materials Research Society	8 国際会議録 Structure, Composition and Order at Interfaces of Crystalline Oxides and Other High-K Materials on Silicon Gustafsson, T, Garfunkel, E, Goncharova, L, Starodub, D., Barnes, R., Dalponte, M, Bersuker, G, Foran, B, Lysaght,P, … Springer
3 国際会議録 Influence of Cu Seed Deposition Temperature on Electroplated Cu Texture Formation in Damascene Structures Jiang, Q-T., Mikkola, R., Ortega, R., Blaschke, V. MRS - Materials Research Society	9 国際会議録 Leveling of Electroplated Cu in Damascene Applications Reid, J., Webb, E., Sukamto, J., Takada, Y., Archer, T. Electrochemical Society
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5 国際会議録 Electroplated Damascene Copper: Process Influences on Recrystallization and Texture Gross, M. E., Drese, R., Lingk, C., Brown, W. L., Evans-Lutterodt, K., Barr, D., Golovin, D., Ritzdorf, T., Turner, J., … MRS - Materials Research Society	11 国際会議録 Particle-Stimulated Nucleation of Dynamic Recrystallization in AZ31 Alloy at Elevated Temperatures Jiang, L., Huang, G., Godet, S., Jonas, J. J., Luo, A. A. Trans Tech Publications
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