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Electroplated Damascene Copper: Process Influences on Recrystallization and Texture

著者名:
Gross, M. E.
Drese, R.
Lingk, C.
Brown, W. L.
Evans-Lutterodt, K.
Barr, D.
Golovin, D.
Ritzdorf, T.
Turner, J.
Graham, L.
さらに 5 件
掲載資料名:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
564
発行年:
1999
開始ページ:
379
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994713 [1558994718]
言語:
英語
請求記号:
M23500/564
資料種別:
国際会議録

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