Blank Cover Image

The Influence of Ti Capping Layers on CoSi2 Formation in the Presence of Interfacial Oxide

著者名:
Detavernier, C.
Donaton, R. A.
Maex, K.
Jin, S.
Bender, H.
Meirhaeghe, R. Van
Cardon, F.
さらに 2 件
掲載資料名:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
564
発行年:
1999
開始ページ:
139
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994713 [1558994718]
言語:
英語
請求記号:
M23500/564
資料種別:
国際会議録

類似資料:

1 国際会議録 CoSi2 Formation Using a Ti Capping Layer - The Influence of Processing Conditions on CoSi2 Nucleation

Detavernier, C., Meirhaeghe, R.L. Van, Maex, K.

Materials Research Society
7 国際会議録 A Study On (CO1-xNIxSI2) Schottky Contacts On N-SI(100) Substrates

Qu, Xin-Ping, Detavernier, C., Van Meirhaeghe, R.L., Cardon, F., Lauwers, A., Maex, K., Li, Bing-Zong

Electrochemical Society
2 国際会議録 The Influence of Ti and TiN on the Thermal Stability of CoSi2

Detavernier, C., Ru, Guo-Ping, Meirhaeghe, R.L. Van, Maex, K.

Materials Research Society
8 国際会議録 Electron Microscopic Studies of Co- and Ti-Germanosilicide Films Formed on SiGe Layers

Jin, S., Donaton, R. A., Bender, H., Maex, K.

MRS - Materials Research Society
3 国際会議録 Epitaxial CoSi2 Formation by a Cr or Mo Interlayer

Detavernier, Christophe, Van Meirhaeghe, Roland L., Cardon, Felix, Maex, K., Brijs, B., Vandervorst, W.

Materials Research Society
9 国際会議録 EFFECT OF AN INTERFACIAL Ti LAYER ON THE FORMATION OF CoSi2 ON Si

Barmak, K., Clevenger, L. A., Agnello, P. D., Ganin, E., Copel, M., Dehaven, P., Falta, J., d'Heurle, F. M., Cabral Jr., …

Materials Research Society
4 国際会議録 Silicide Engineering: Influence Of Alloying Elements On CoSi2 Nucleation

Detavernier, Christophe, Van Meirhaeghe, Roland L., Maex, Karen, Cardon, Felix

Materials Research Society
10 国際会議録 New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications

Donaton, R. A., Jin, S., Bender, H., Zagrebnov, M., Baert, K., Maex, K., Vantomme, A., Langouche, G.

MRS - Materials Research Society
5 国際会議録 A BEEM Study of PtSi Schottky Contacts on Ion-Milled Si

Ru, G-P., Detavernier, C., Donaton, R. A., Blondeel, A., Clauws, P., Meirhaeghe, R. L. Van, Cardon, F., Maex, K., Qu, …

MRS - Materials Research Society
11 国際会議録 Silicide Formation for Ni and Pd Bilayers on Si(100) Substrates

Qu, Xin-Ping, Detavernier, C., Meirhaeghe, R.L. Van, Cardon, F.

Materials Research Society
6 国際会議録 Controlling CoSi2 Nucleation: The Effect Of Entropy Of Mixing

Detavernier, Christophe, Van Meirhaeghe, Roland L., Maex, Karen, Cardon, Felix

Materials Research Society
12 国際会議録 Formation and Characterization of SPE Grown Ultra-Thin Cobalt Disilicide Film

Qu, X-P., Ru, G-P., Li, B-Z., Detavernier, C., Meirhaeghe, R. L. Van, Cardon, F.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12