Analysis of Failure in Metallic Thin-Film Interconnects Due to Stress and Electromigration-Induced Void Propagation
- 著者名:
- 掲載資料名:
- Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 516
- 発行年:
- 1998
- 開始ページ:
- 165
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994225 [155899422X]
- 言語:
- 英語
- 請求記号:
- M23500/516
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
Materials Research Society |
MRS - Materials Research Society |
3
国際会議録
177a. Non-Linear Analysis of Electromigration-Induced Surface Waves on Voids in Metallic Thin Films
American Institute of Chemical Engineers |
MRS - Materials Research Society |
American Institute of Chemical Engineers |
Materials Research Society |
5
国際会議録
564c. Effects of Elastic Stress on Electromigration-Driven Void Dynamics in Metallic Thin Films
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
Electrochemical Society |