High-Quality Germanium Photodiodes on Silicon Substrates Using an Intermediate Chemical Mechanical Polishing Step

High-Quality Germanium Photodiodes on Silicon Substrates Using an Intermediate Chemical Mechanical Polishing Step

著者名:

掲載資料名:

Materials and devices for silicon-based optoelectronics : symposium held December 1-3, 1997, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

486

発行年:

1998

開始ページ:

187

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993914 [1558993916]

言語:

英語

請求記号:

M23500/486

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019842
シリーズID:	PA00000011
会議名:	Symposium on materials and devices for silicon-based optoelectronics
回次:	1997
会議開催地:	Boston, MA, USA
会議開催年:	1997.12.01-1997.12.03

類似資料:

1 国際会議録 Suppression of Antiphase Disorder in GaAs Grown on Relaxed GeSi Buffers by Metalorganic Chemical Vapor Deposition Ting, S. M., Samavedam, S. B., Currie, M. T., Langdo, T. A., Fitzgerald, E. A. MRS - Materials Research Society	7 国際会議録 (8.4) 5:15 - 5:35 PM - A Novel, High Quality SiGe Graded Buffer Growth Process Using GeCl4 Westhoff, R., Carlin, J., Erdtmann, M., Langdo, T., Leitz, C., Y., V., Petrocelli, K., Bulsara, M., Fitzgerald, E.A., … Electrochemical Society
2 国際会議録 Monolithic integration of ?-V materials and devices on silicon Ting,S., Bulsara,M., Yang,V., Groenert,M., Samavedam,S., Currie,M., Langdo,T., Fitzgerald,E.A., Joshi,A.M., Brown,R., … SPIE - The International Society for Optical Engineering	8 国際会議録 Growth and Characterization of High-Ge Content SiGe Virtual Substrates Erdtmann, M., Carroll, M., Carlin, I., Langdo, T., Westhoff, R., Leitz, C., Yang, V., Currie, M., Lochtefeld, T., … Electrochemical Society
3 国際会議録 Influence of Substrate Off-Cut the Defect Structure in Relaxed Graded Si-Ge/Si Layers Samavedam, Srikanth B., Romanato, F., Goorsky, M. S., Fitzgerald, E. A. MRS - Materials Research Society	9 国際会議録 Strained-Si-on-Insulator (SSOI) and SiGe-on-Insulator (SGOI): Fabrication Obstacles and Solutions Taraschi, Gianni, Pitera, Arthur J., McGill, Lisa M., Cheng, Zhi-Yuan, Lee, Minjoo L., Langdo, Thomas A., Fitzgerald, … Materials Research Society
4 国際会議録 Relaxed Silicon-Germanium on Insulator (SGOI) Cheng, Zhiyuan, Currie, Matthew T., Leitz, Chris W., Taraschi, Gianni, Lee, Minjoo L., Pitera, Arthur, Hoyt, Judy L., … Materials Research Society	10 国際会議録 Chemical Mechanical Polishing of Epitaxial Germanium on SiO₂-patterned Si(001) Substrates J.M. Hydrick, J. Park, J. Bai, C. Major, M. Curtin Electrochemical Society
5 国際会議録 Silicon Germanium Epitaxy: A New Material For MEMS Boreenstein, J.T., Gerrish, N.D., White, R., Currie, M.T., Fitzgerald, E.A. Materials Research Society	11 国際会議録 Optimization of SiGe Graded Buffer Defectivity and Throughput by Means of High Growth Temperature and Pre-Threaded Substrates Ertmann, Matthew, Currie, Matthew T., Woicik, Joseph C., Black, David Materials Research Society
6 国際会議録 Channel Engineering of SiGe-Based Heterostructures for High Mobility MOSFETs Leitz, Christopher W., Currie, Matthew T., Lee, Minjoo L., Cheng, Zhiyuan, Antoniadis, Dimitri A., Fitzgerald, Eugene A. Materials Research Society	12 国際会議録 Relaxed SiGe On Insulator Fabricated via Wafer Bonding and Layer Transfer: Etch-back and Smart-cut Alternatives Taraschi, G., Cheng, Z.-Y., Currie, M.T., Leitz, C.W., Langdo, T.A., Lee, M.L., Pitera, A., Fitzgerald, E.A., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12