Low Temperature Fabrication of (Ba,Sr)TiO3 Thin Films by ECR Plasma CVD
- 著者名:
Kato, Y. Yabuta, H. Sone, S. Yamaguchi, H. Iizuka, T. Yamamichi, S. Lesaicherre, P-Y. Nishimoto, S. Yoshida, M. - 掲載資料名:
- Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 433
- 発行年:
- 1996
- 開始ページ:
- 3
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993365 [1558993363]
- 言語:
- 英語
- 請求記号:
- M23500/433
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |
10
国際会議録
Heteroepitaxial Growth of 3C-SiC on Si (111) at Low Substrate Temperature by Plasma Assisted CVD
Trans Tech Publications |
5
国際会議録
SrTiO3 AND (Ba,Sr)TiO3 THIN FILMS PREPARATION BY ION BEAM SPUTTERING AND THEIR DIELECTRIC PROPERTIES
Materials Research Society |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |