Formation and High Frequency CV-Measurements of Aluminum/Aluminum Nitride/6H Silicon Carbide Structures

Formation and High Frequency CV-Measurements of Aluminum/Aluminum Nitride/6H Silicon Carbide Structures

著者名:

Zetterling, C.-M.

掲載資料名:

III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

423

発行年:

1996

開始ページ:

667

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993266 [1558993266]

言語:

英語

請求記号:

M23500/423

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019836
シリーズID:	PA00000011
会議名:	Symposium on III-nitride, SiC and diamond materials for electronic devices
回次:	1996
会議開催地:	San Francisco, CA, USA
会議開催年:	1996.04.08-1996.04.12

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2 国際会議録 Challenges for High Temperature Silicon Carbide Electronics Zetterling, C. -M., Koo, S. -M., Danielsson, E., Liu, W., Lee, S. -K., Domeij, M., Lee, H. -S., Ostling, M. Materials Research Society	8 国際会議録 Thin films in silicon carbide semiconductor devices (Invited Paper) Ostling, M., Koo, S.-M., Lee, S.-K., Zetterling, C.-M., Grishin, A. SPIE - The International Society of Optical Engineering
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