Growth of Crystalline Quality SiC on Thin and Thick Silicon-on-Insulator Structures
- 著者名:
Namavar, F. Colter, P. Cremins-Costa, A. Wu, C-H. Gagnon, E. Perry, D. Pirouz, P. - 掲載資料名:
- III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 423
- 発行年:
- 1996
- 開始ページ:
- 409
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993266 [1558993266]
- 言語:
- 英語
- 請求記号:
- M23500/423
- 資料種別:
- 国際会議録
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12
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Loss measurements for β-SiC-on-insulator waveguides for high-speed silicon-based photonic devices
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