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Titanium Silicidation and Secondary Defect Annihilation in Ion Beam Processed SiGe Layers

著者名:
Larsen, K. Kyllesbech
Via, F. La
Lombardo, S.
Raineri, V.
Donaton, R. A.
Campisano, S. U.
さらに 1 件
掲載資料名:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
402
発行年:
1996
開始ページ:
149
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993051 [1558993053]
言語:
英語
請求記号:
M23500/402
資料種別:
国際会議録

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