KINETICS OF DIAMOND-LIKE FILM GROWTH USING FILAMENT-ASSISTED CHEMICAL VAPOR DEPOSITION

KINETICS OF DIAMOND-LIKE FILM GROWTH USING FILAMENT-ASSISTED CHEMICAL VAPOR DEPOSITION

著者名:

Gorsuch, G.

掲載資料名:

Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

363

発行年:

1995

開始ページ:

151

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992641 [1558992642]

言語:

英語

請求記号:

M23500/363

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019831
シリーズID:	PA00000011
会議名:	Symposium on chemical vapor deposition of refractory metals and ceramics
回次:	3rd
会議開催地:	Boston, MA, USA
会議開催年:	1994.11.28-1994.11.30

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2 国際会議録 HYDROGEN IN POLYCRYSTALLINE DIAMOND FILMS GROWN BY HOT FILAMENT CHEMICAL VAPOR DEPOSITION Spitsyn, B., Khasawinah, S., Sung, T., Miller, W.H., Popvici, G., Prelas, M.A., Charlson, E.J., Charlson, E.M., Meese, … Electrochemical Society	8 国際会議録 MODELLING OF GAS-PHASE AND SURFACE KINETICS IN MOVPE OF GaAs AND AlXGa1-XAs Mountziaris, T.J., Ingle, N.K., Kalyanasundaram, S. Materials Research Society
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4 国際会議録 Growth and Characterization of Polycrystalline Diamond Thin Films on Porous Silicon by Hot Filament Chemical Vapor Deposition Mirzakuchaki, S., Charlson, E. J., Charlson, E. M., Stacy, T., Shahedipour, F., White, H. W. MRS - Materials Research Society	10 国際会議録 Nucleation of Diamond on Si Cones by Biased Hot Filament Chemical Vapor Deposition Wang, W.L., Liao, K.J., Wang, S.X., Xiao, J.L. Electrochemical Society
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