Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

著者名:

Goldberg,K.A. ( Lawrence Berkeley National Lab.and Univ.of California/Berkeley )

掲載資料名:

Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3048

発行年:

1997

開始ページ:

264

終了ページ:

270

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424624 [0819424625]

言語:

英語

請求記号:

P63600/3048

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019826
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Emerging lithographic technologies
回次:	1997
会議開催地:	Santa Clara, CA, USA
会議開催年:	1997.03.10-1997.03.11

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2 国際会議録 Recent advances in EUV phase-shifting point diffraction interferometry Naulleau,P., Goldberg,K.A., Lee,S.H., Chang,C.C., Batson,P.J., Attwood,D.T.,Jr., Bokor,J. SPIE - The International Society for Optical Engineering	8 国際会議録 EUV holographic aerial image recording Lee,S.H., Naulleau,P., Goldberg,K.A., Cho,C.H., Bokor,J. SPIE - The International Society for Optical Engineering
3 国際会議録 Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer Naulleau,P., Gldberg,K.A., Anderson,E.H., Batson,P.J., Denham,P., Jackson,K.H., Rekawa,S., Bokor,J. SPIE-The International Society for Optical Engineering	9 国際会議録 Direct comparison of EUV and visible-light interferometries Goldberg,K.A., Naulleau,P., Lee,S.H., Chang,C., Bresloff,C.J., Gaughan,R.J., Chapman,H.N., Goldsmith,J.E.M., Bokor,J. SPIE - The International Society for Optical Engineering
4 国際会議録 At-wavelength testing of optics for EUV K.A. Goldberg, H.R. Beguiristain, J. Bokor, H. Medecki, K. Jackson Society of Photo-optical Instrumentation Engineers	10 国際会議録 Performance upgrades in the EUV engineering test stand Tichenor, D.A., Replogle, W.C., Lee, S.H., Ballard, W.P., Leung, A.H., Kubiak, G.D., Klebanoff, L.E., Graham, S., … SPIE-The International Society for Optical Engineering
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