SCALPEL proof-of-concept system:preliminary lithography results | 東京工業大学附属図書館文献データベース

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SCALPEL proof-of-concept system:preliminary lithography results

著者名:

Waskiewicz,W.K. ( Lucent Technologies/Bell Labs. )

さらに 14 件

掲載資料名:

Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3048

発行年:

1997

開始ページ:

255

終了ページ:

263

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424624 [0819424625]

言語:

英語

請求記号:

P63600/3048

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019826
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Emerging lithographic technologies
回次:	1997
会議開催地:	Santa Clara, CA, USA
会議開催年:	1997.03.10-1997.03.11

類似資料:

1 国際会議録 Alignment mark detection in CMOS materials with SCALPEL e-beam lithography Farrow,R.C., Waskiewicz,W.K., Kizilyalli,I.C., Callatin,G.M., Liddle,J.A., Mkrtchyan,M.M., Kornblit,A., Ocola,L.E., … SPIE - The International Society for Optical Engineering	7 国際会議録 SCALPEL mask blank fabrication Saunders,T.E., Blakey,M.I., Caminos,C., Bogart,G.R., Farrow,R.C., Knurek,C.S., Kornblit,A., Liddle,J.A., Novembre,A.E., … SPIE - The International Society for Optical Engineering
2 国際会議録 Writing strategy for a high-throughput SCALPEL system Stanton,S.T., Liddle,J.A., Felker,J.A., Waskiewicz,W.K., Harriott,L.R. SPIE - The International Society for Optical Engineering	8 国際会議録 Electron-optical design for the SCALPEL proof-of-concept tool W.K. Waskiewicz, S.D. Berger, L.R. Harriott, M.M. Mkrtchyan, S.W. Bowler Society of Photo-optical Instrumentation Engineers
3 国際会議録 Space-charge results from the SCALPEL proof-of-concept system Liddle,J.A., Blakey,M.I., Gallatin,G.M., Knurek,C.S., Mkrtchyan,M.M., Novembre,A.E., Waskiewicz,W.K. SPIE - The International Society for Optical Engineering	9 国際会議録 Fabrication and commercialization of scalpel masks (Invited Paper) Novenber,A.E., Peabody,M.L., Blakey,M.I., Farrow,R.C., Kasica,R.J., Liddle,J.A., Saunders,T.E., Tennant,D.M. SPIE-The International Society for Optical Engineering
4 国際会議録 SCALPEL masks J.A. Liddle, M. Blakey, K. Bolan, R. Farrow, L.A. Fetter Society of Photo-optical Instrumentation Engineers	10 国際会議録 Overlay error budgets for a high-throughput SCALPEL system Stanton,S.T., Farrow,R.C., Gallatin,C.M., Liddle,J.A., Waskiewicz,W.K. SPIE - The International Society for Optical Engineering
5 国際会議録 Overview of SCALPEL mask technology Bogart,G.R., Novembre,A.E., Kornblit,A., Peabody,M.L., Farrow,R.C., Blakey,M.I., Kasica,R.J., Liddle,J.A., … SPIE - The International Society for Optical Engineering	11 国際会議録 Critical issues for developing a high-throughput SCALPEL system for sub-0.18-ｦﾌm lithography generations Stanton,S.T., Liddle,J.A., Waskiewicz,W.K., Mkrtchyan,M.M., Novembre,A.E., Harriott,L.R. SPIE-The International Society for Optical Engineering
6 国際会議録 200-mm SCALPEL mask development Bogart,G.R., Novembre,A.E., Kornblit,A., Peabody,M.L., Farrow,R.C., Blakey,M.I., Kasica,R.J., Liddle,J.A., … SPIE - The International Society for Optical Engineering	12 国際会議録 Yield,metrology,and inspection characteristics of SCALPEL masks Peabody,M.L., Blakey,M.I., Farrow,R.C., Kasica,R.J., Liddle,J.A., Novembre,A.E., Saunders,T.E., Tennant,D.M., Windt,D.L. SPIE-The International Society for Optical Engineering

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