Ferroelectric PbZr1-xTixO3 thin films made by various metalorganic chemical vapor deposition techniques
- 著者名:
- Li,T. ( Emcore Corp. )
- Zawadzki,P.A.
- Stall,R.A.
- Kroll,W.J.
- 掲載資料名:
- Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3008
- 発行年:
- 1997
- 開始ページ:
- 359
- 終了ページ:
- 364
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424198 [0819424196]
- 言語:
- 英語
- 請求記号:
- P63600/3008
- 資料種別:
- 国際会議録
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1
国際会議録
Ferroelectric SrBi2Ta2O9 thin films made by one-and two-step metalorganic chemical vapor deposition
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering | |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society | |
MRS - Materials Research Society |
MRS-Materials Research Society |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |