Silicon mirror arrays fabricated by using bulk and surface micromachining
- 著者名:
Gessner,T. ( Technical Univ.of Chemnitz-Zwickau ) Dotzel,W. Billep,D. Hahn,R. Kaufmann,C. Kehr,K. Kurth,S. Steiniger,C. Wollmann,U. - 掲載資料名:
- Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3008
- 発行年:
- 1997
- 開始ページ:
- 296
- 終了ページ:
- 305
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424198 [0819424196]
- 言語:
- 英語
- 請求記号:
- P63600/3008
- 資料種別:
- 国際会議録
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