Optical characterization methods of InP-based micro-opto-electro-mechanical systems
- 著者名:
Dantec,R.Le ( Institut National des Sciences Appliquees de Lyon ) Benyattou,T. Guillot,G. Seassal,C. Leclercq,J.-L. Letartre,X. Gagnaire,A. Gendry,M. Viktorovitch,P. Benferhat,R. Rondi,D. Blondeau,R.R. - 掲載資料名:
- Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3008
- 発行年:
- 1997
- 開始ページ:
- 258
- 終了ページ:
- 264
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424198 [0819424196]
- 言語:
- 英語
- 請求記号:
- P63600/3008
- 資料種別:
- 国際会議録
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