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Optical displacement measurement using a monolithic Michelson interferometer

著者名:
掲載資料名:
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3008
発行年:
1997
開始ページ:
142
終了ページ:
151
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424198 [0819424196]
言語:
英語
請求記号:
P63600/3008
資料種別:
国際会議録

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