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Automated visual inspection stations for next-generation semiconductor package quality control

著者名:
DeYong,M.R. ( Intelligent Reasoning Systems,Inc. )
Eskridge,T.C.
Grace,J.W.
Newberry,J.E.
Jones,J.H.
Hart,B.E.
さらに 1 件
掲載資料名:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2877
発行年:
1996
開始ページ:
99
終了ページ:
110
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422750 [0819422754]
言語:
英語
請求記号:
P63600/2877
資料種別:
国際会議録

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