Accurate overlay control for 0.30-ｦﾌm i-line lithography

Accurate overlay control for 0.30-ｦﾌm i-line lithography

著者名:

Kim,K.-Y. ( Hyundai Electronics Industries Co.,Ltd. )
Hur,I.-B.
Jang,G.-J.
Choi,S.-H.

掲載資料名:

Metrology, Inspection, and Process Control for Microlithography X

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2725

発行年:

1996

開始ページ:

379

終了ページ:

387

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421012 [0819421014]

言語:

英語

請求記号:

P63600/2725

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019794
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Metrology,Inspection, and Process Control for Microlithography
回次:	1996 : 10th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1996.03.11-1996.03.13

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