Development and production integration of a planarized AlCu interconnect process for submicron CMOS
- 著者名:
- Brown,K.C. ( National Semiconductor Corp. )
- Hill,R.
- Reddy,K.
- Gadepally,K.
- 掲載資料名:
- Microelectronic Device and Multilevel Interconnection Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2636
- 発行年:
- 1995
- 開始ページ:
- 234
- 終了ページ:
- 243
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420022 [0819420026]
- 言語:
- 英語
- 請求記号:
- P63600/2636
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
American Institute of Chemical Engineers |
SPIE-The International Society for Optical Engineering |