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Oxide/nitride stacked layers prepared by in situ rapid-thermal multiprocessing

著者名:
掲載資料名:
Microelectronic Device and Multilevel Interconnection Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2636
発行年:
1995
開始ページ:
198
終了ページ:
207
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420022 [0819420026]
言語:
英語
請求記号:
P63600/2636
資料種別:
国際会議録

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