Hydrogen Interaction with Disordered Silicon

Hydrogen Interaction with Disordered Silicon

著者名:

掲載資料名:

Plasma properties, deposition and etching

シリーズ名:

Materials science forum

シリーズ巻号:

140-142

発行年:

1993

開始ページ:

603

終了ページ:

618

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496709 [087849670X]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019749
シリーズID:	PA00000012

類似資料:

1 国際会議録 SUPPRESSION OF ACCEPTOR DEACTIVATION IN SILICON BY DISORDERED SURFACE REGIONS Srikanth, K., Ashok, S. Materials Research Society	7 国際会議録 INTERACTION OF ATOMIC HYDROGEN WITH ION BOMBARDMENTS INDUCED DEFECTS AT Si/SiO2 INTERFACES Kar, S., Ashok, S. Materials Research Society
2 国際会議録 OXYGEN-DOPED-SILICON/SILICON HETEROINTERFACES BY ION IMPLANTATION Srikanth, K., Ashok, s. Materials Research Society	8 国際会議録 Blistering and Splitting in Hydrogen-Implanted Silicon Ntsoenzok, E., Assaf, H., Ashok, S. Materials Research Society
3 国際会議録 OXYGEN DOPED SILICON SURFACE LAYERS BY ION IMPLANTATION Srikanth, K., Ashok, S,. Materials Research Society	9 国際会議録 Boron Implantation Into Silicon Subject To Hydrogen Plasma Rangan, Sanjay, Horn, Mark, Ashok, S. Materials Research Society
4 国際会議録 ATOMIC HYDROGEN PASSIVATION OF HIGH ENERGY HYDROGEN IMPLANTS Srikanth, K., Shenal, J., Ashok, S. Materials Research Society	10 国際会議録 The Role Of Hydrogen In Disordered Silicon Nickel, N.H. Materials Research Society
5 国際会議録 PASSIVATION OF ION-BEAM-INDUCED DEFECTS AT AND AROUND THE Si-SiP2 INTERFACE BY ION BEAM HYDROGENATION Kar, S., Srikanth, K., Ashok, S. Materials Research Society	11 国際会議録 Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon Alquier, D., Ntsoeazok, E., Liu, C.L., Vengurlekar, A., Ashok, S. Materials Research Society
6 国際会議録 HIGH DOSE CARBON ION IMPLANTATION STUDIES IN SILICON Srikanth, K., Chu, M., Ashok, S., Nguyen, N., Vedam, K. Materials Research Society	12 国際会議録 Influence of Laser Annealing on Hydrogen Bonding in Disordered Silicon Thin Films Nickel, N. H., Brendel, K. Materials Research Society

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