Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas

Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas

著者名:

掲載資料名:

Plasma properties, deposition and etching

シリーズ名:

Materials science forum

シリーズ巻号:

140-142

発行年:

1993

開始ページ:

107

終了ページ:

120

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496709 [087849670X]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019749
シリーズID:	PA00000012

類似資料:

1 国際会議録 Time Dependent Electron Energy Distribution Functions in Molecular Gases Capitelli M. Gorse, Longo S. Plenum Press	7 テクニカルペーパー Transport properties of high temperature air species Capitelli, M., Gorse, C., Longo, S., Giordano, D. American Institute of Aeronautics and Astronautics
2 国際会議録 ELECRON ENERGY DISTRIBUTION FUNCTION IN RF MOLECULAR PLASMAS Dilonardo, M., Capitelli, M., Winkler, R., Wilhelm J. Materials Research Society	8 テクニカルペーパー Non-equilibrium vibrational distributions of N2 in RF parallel plate reactors: a self-consistent approach Longo, S., Hassouni, K., Capitelli, M. American Institute of Aeronautics and Astronautics
3 国際会議録 NON-EQUILIBRIUM VIBRATIONAL, ELECTRONIC AND DISSOCIATION KINETICS IN MOLECULAR PLASMAS AND THEIR COUPLING WITH THE ELECTRON ENEGY DISTRIBUTION FUNCTION Gorse C., Capitelli M. Kluwer Academic Publishers	9 テクニカルペーパー Non equilibrium vibrational kinetics under discharge and hypersonic flow conditions: a comparison Capitelli, M., Armenise, I., Colonna, G., Giordano, D., Gorse, C., Longo, S. American Institute of Aeronautics and Astronautics
4 テクニカルペーパー Non Maxwell behaviour of electron energy distribution functions in expanding nitrogen arcs Capitelli, M., Dyatko, N., Hassouni, K., Gorse, C., Longo, S. American Institute of Aeronautics and Astronautics	10 国際会議録 On the coupling of non-equilibrium vibrational kinetics and dissociation-recombination processes in the boundary layer surrounding an hypersonic reentry vehicle Armenise, I., Capitelli, M., Gorse, C. ESA Publications Division
5 国際会議録 NON EQUILIBRIUM PLASMA KINETICS Capitelli M., Gorse C. Plenum Press	11 国際会議録 FUNDAMENTAL ASPECTS OF THE COUPLING OF NON-EQUILIBRIUM VIBRATIONAL KINETICS AND DISSOCIATION-RECOMBINATION PROCESSES WITH THE BOUNDARY LAYER FLUIDYNAMICS IN N2 … Armenise I., Capitelli M., Gorse C. Kluwer Academic Publishers
6 国際会議録 PROBLEMS IN THE EXPERIMENTAL DETERMINATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN RF DISCHARGES Dilecce G., Capittelli M., Benedictis De S., Gorge C. Plenum Press	12 国際会議録 Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas Kortshagen U. Plenum Press

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