Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement
- 著者名:
- Duparre,A. ( Fraunhofer Institute for Applied Optics and Precision Engineering (FRG) )
- Gliech,S. ( Fraunhofer Institute for Applied Optics and Precision Engineering (FRG) )
- 掲載資料名:
- 10th Meeting on Optical Engineering in Israel, 2-6 March 1997, Jerusalem, Israel
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3110
- 発行年:
- 1997
- 巻:
- Part 2
- 開始ページ:
- 566
- 終了ページ:
- 573
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425324 [081942532X]
- 言語:
- 英語
- 請求記号:
- P63600/3110
- 資料種別:
- 国際会議録
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6
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Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter
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