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Plasma diagnostics in KrF excimer laser deposition of Ti thin films

著者名:
  • Hong,M.H. ( National Univ.of Singapore )
  • Lu,Y.F. ( National Univ.of Singapore )
  • Ho,T.M. ( National Univ.of Singapore )
  • Lu,L.W. ( Chartered Semiconductor Manufacturing Pte. Ltd. (Singapore) )
  • Low,T.S. ( National Univ.of Singapore )
掲載資料名:
Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3550
発行年:
1998
開始ページ:
441
終了ページ:
449
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430113 [0819430110]
言語:
英語
請求記号:
P63600/3550
資料種別:
国際会議録

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