A SELF-CONSISTENT MONTE CARLO MODELING OF RF NON-EQUILIBRIUM PLASMA
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Electrochemical Society | |
MRS - Materials Research Society |
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Non-equilibrium vibrational distributions of N2 in RF parallel plate reactors: a self-consistent approach
American Institute of Aeronautics and Astronautics |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
ESA Publications Division |
Electrochemical Society |
American Institute of Chemical Engineers |
Kluwer |
Springer-Verlag |
Electrochemical Society |