Fabrication of polymer high-aspect-ratio structures with hot embossing for microfluidic applications

Fabrication of polymer high-aspect-ratio structures with hot embossing for microfluidic applications

著者名:

Becker,H. ( Jenoptik Mikrotechnik GmbH )
Heim,U.
Rotting,O.

掲載資料名:

Microfluidic Devices and Systems II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3877

発行年:

1999

開始ページ:

74

終了ページ:

79

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434746 [0819434744]

言語:

英語

請求記号:

P63600/3877

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019482
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microfluidic Deveces and Systems
回次:	1999 : 2nd
会議開催地:	Santa Clara, CA, USA
会議開催年:	1999.09.20-1999.09.21

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