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Micromachined flow-handing components:micropumps

著者名:
掲載資料名:
Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3857
発行年:
1999
開始ページ:
52
終了ページ:
60
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434500 [0819434507]
言語:
英語
請求記号:
P63600/3857
資料種別:
国際会議録

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