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Intelligent control of piezoelectric actuators for precision manufacturing

著者名:
Kwan,C. ( Intelligent Automation,Inc. )
Xu,R.
Lang,J.
Lin,C.
Stevenson,M.W.
Lin,Y.
Ren,Z.
Haynes,L.S.
さらに 3 件
掲載資料名:
Intelligent systems in design and manufacturing
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3833
発行年:
1999
開始ページ:
2
終了ページ:
11
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434265 [0819434264]
言語:
英語
請求記号:
P63600/3833
資料種別:
国際会議録

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