Design and sensitivity optimization of vibration sensors for tool-state monitoring
- 著者名:
- Thomas,J.S. ( Fraunhofer-Institut fur Integrierte Schaltungen )
- Kuhnhold,R.
- Ryssel,H.
- 掲載資料名:
- Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3680
- 発行年:
- 1999
- 巻:
- Part1
- 開始ページ:
- 423
- 終了ページ:
- 431
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- 言語:
- 英語
- 請求記号:
- P63600/3680
- 資料種別:
- 国際会議録
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12
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Analysis tool and methodology design for electronic vibration stress understanding and prediction
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