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Silicon microgripper for microassembly realized by photolithography and fast anisotropic silicon etching

著者名:
掲載資料名:
Microrobotics and micromanipulation : 4-5 November 1998, Boston, Massachusetts
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3519
発行年:
1998
開始ページ:
13
終了ページ:
21
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429803 [0819429805]
言語:
英語
請求記号:
P63600/3519
資料種別:
国際会議録

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