Issues and nonissues on a 193-nm step-and-scan system in production
- 著者名:
Schefske,J.A. ( Advanced Micro Devices,Inc. ) Kent,E. Okoroanyanwu,U. Levinson,H.J. Masud,C.R. Streefkerk,B. Hanzen,R. Brueback,J. - 掲載資料名:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4000
- 発行年:
- 2000
- 巻:
- Part1
- 開始ページ:
- 460
- 終了ページ:
- 471
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- 言語:
- 英語
- 請求記号:
- P63600/4000
- 資料種別:
- 国際会議録
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