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New technique for direct integration of mechanical motion with electronics on a chip

著者名:
掲載資料名:
Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3990
発行年:
2000
開始ページ:
28
終了ページ:
35
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436085 [0819436089]
言語:
英語
請求記号:
P63600/3990
資料種別:
国際会議録

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