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Effects of in situ DC-Bias on the composition, microstructures and dielectric properties of RF magnetron reactive sputtered (Ba,Sr) TiO3 films

著者名:
掲載資料名:
Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
596
発行年:
2000
開始ページ:
43
出版情報:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995048 [1558995048]
言語:
英語
請求記号:
M23500/596
資料種別:
国際会議録

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