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CONTROL OF Si-SiO2 INTERFACE PROPERTIES IN MOS DEVICES PREPARED BY PLASMA-ASSISTED AND RAPID THERMAL PROCESSES

著者名:
Lucovsky, G.
Yasuda, T.
Ma, Y.
Hattangady, S. V.
Xu, X-L.
Misra, V.
Hornung, B.
Wortman, J. J.
さらに 3 件
掲載資料名:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
318
発行年:
1994
開始ページ:
81
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992177 [1558992170]
言語:
英語
請求記号:
M23500/318
資料種別:
国際会議録

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