TAILORING OF MECHANICAL PROPERTIES IN MICROLAMINATES

TAILORING OF MECHANICAL PROPERTIES IN MICROLAMINATES

著者名:

掲載資料名:

Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

308

発行年:

1993

開始ページ:

759

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992047 [1558992049]

言語:

英語

請求記号:

M23500/308

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019387
シリーズID:	PA00000011
会議名:	Symposium on thin films: stresses and mechanical properties
回次:	4th
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.12-1993.04.16

類似資料:

1 国際会議録 TEXTURE IN SPUTTERED Mo FILMS Karpenko, O. P., Vill, M., Malhotra, S. G., Bilello, J. C., Yalisove, S. M. MRS - Materials Research Society	7 国際会議録 Native Oxide and the Residual Stress of Thin Mo and Ta Films Parfitt, L. J., Rek. Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
2 国際会議録 DEPTH PROFILING OF MOLYBDENUM THIN FILMS USING GRAZING INCIDENCE X-RAY SCATTERING Malhotra, Sandra G., Rek, Z., Vill, M., Karpenko, O. P., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society	8 国際会議録 Probing Stress State and Phase Content in Ultrathin Ta Films Whitacre, J. F., Rek, Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
3 国際会議録 WHITE-BEAM TRANSMISSION CHARACTERIZATION OF TEXTURE IN Mo THIN FILMS AND Mo/W MULTILAYERS Vill, Marc, Malhotra, S. G., Rek, Z., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society	9 国際会議録 On the Measurement of Residual Stress in Thin Films Zhao, Z. B., Hershberger, J., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
4 国際会議録 Depth-Sensitive Strain Analysis of a W/Ta/W Trilayer Malhotra, S. G., Rek, Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society	10 国際会議録 Deposition Kinetics and Microstructural Evolution in Sputtered Ta Films: A Real-Time//n Situ Study Bilello, J. C., Whitacre, J. F., Yalisove, S. M. Materials Research Society
5 国際会議録 Depth Dependence of Residual Strains in Textured Mo Thin Films Using High-Resolution X-ray Diffraction Malhotra, S. G., Rek, Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society	11 国際会議録 Origin of In-Plane Texturing in Sputtered Mo Films Malhotra, A. K., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
6 国際会議録 The Role of Roughness in Texture Development Whitacre, J. F., Bilello, J. C., Yalisove, S. M. MRS - Materials Research Society	12 国際会議録 Origins of Residual Stress in Mo and Ta Films: The Role of Impurities, Microstructural Evolution, and Phase Transformations Parfitt, L. J., Karpenko, O. P., Rek, Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society

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