MECHANICAL AND OPTICAL PROPERTIES OF THIN FILMS OF TANTALUM OXIDE DEPOSITED BY ION-ASSISTED DEPOSITION
- 著者名:
Martin, P. J. Bendavid, A. Swain, M. V. Netterfield, R. P. Kinder, T. J. Sainty, W. G. Drage, D. - 掲載資料名:
- Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 308
- 発行年:
- 1993
- 開始ページ:
- 583
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992047 [1558992049]
- 言語:
- 英語
- 請求記号:
- M23500/308
- 資料種別:
- 国際会議録
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