MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON

MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON

著者名:

Romano-Rodriguez, A.

掲載資料名:

Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

308

発行年:

1993

開始ページ:

361

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992047 [1558992049]

言語:

英語

請求記号:

M23500/308

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019387
シリーズID:	PA00000011
会議名:	Symposium on thin films: stresses and mechanical properties
回次:	4th
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.12-1993.04.16

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