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Measurement of Residual Stress in Thin Films Using the Optical Microprobe

著者名:
掲載資料名:
Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
505
発行年:
1998
開始ページ:
513
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994102 [1558994106]
言語:
英語
請求記号:
M23500/505
資料種別:
国際会議録

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