Low-Temperature Remote-Plasma-Assisted Jet Vapor Deposition of Silicon Nitride
- 著者名:
Veteran, J. Hobbs, C. Hegde, R. Tobin, P. Wang, V. Tseng, H. Kenig, G. Hartig, M. Tamagawa, T. Doran, R. Makowicz, P. Schmitt, J. Halpern, B. Zhang, J. Z. - 掲載資料名:
- Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 495
- 発行年:
- 1998
- 開始ページ:
- 445
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994003 [1558994009]
- 言語:
- 英語
- 請求記号:
- M23500/495
- 資料種別:
- 国際会議録
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