Grain Enhancement of Polycrystalline Silicon Films Aided by Optical Excitation
- 著者名:
Sopori, B. L. Chen, W. Alleman, J. Matson, R. Ravindra, N. M. Tan, T. Y. - 掲載資料名:
- Thin-film structures for photovoltaics : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 485
- 発行年:
- 1998
- 開始ページ:
- 95
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993907 [1558993908]
- 言語:
- 英語
- 請求記号:
- M23500/485
- 資料種別:
- 国際会議録
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6
国際会議録
GRAIN GROWTH PROCESSES DURING TRANSIENT ANNEALING OF As-IMPLANTED, POLYCRYSTALLINE-SILICON FILMS
Materials Research Society |
MRS - Materials Research Society |