Impact of Chemical and Epitaxial Treatment on Surface Defects on Silicon Wafers

Impact of Chemical and Epitaxial Treatment on Surface Defects on Silicon Wafers

著者名:

Schmolke, R.

掲載資料名:

Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

442

発行年:

1997

開始ページ:

137

出版情報:

Pittsburgh, Penn: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993464 [1558993460]

言語:

英語

請求記号:

M23500/442

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019374
シリーズID:	PA00000011
会議名:	Symposium on defects in electronic materials
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1996.12.02-1996.12.06

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2 国際会議録 Morphology of silicon wafer surfaces:a comparative study with stomic force microscopy and other techniques Wagner,P., Gerber,H.A., Graf,D., Schmolke,R., Suhren,M. SPIE-The International Society for Optical Engineering	8 国際会議録 Surfaces and Crystal Defects of Silicon Wagner, P., Brohl, M., Graf, D., Lambert, U. MRS - Materials Research Society
3 国際会議録 The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface Graef, D., Suhren, M., Lambert, U., Schmolke, R., Ehiert, A., Ammon, W.v., Wagner, P. Electrochemical Society	9 国際会議録 Crystal Defects in Highly Boron Doped Silicon Suhren, M., Graef, D., Lambert, U., Wagner, P. Electrochemical Society
4 国際会議録 Inspection of silicon wafer backsurfaces Schmolke, R., Passek, F., Gerber, H.-A., Lambert, U., Puppe, G., Piontek, H., Wagner, P. Electrochemical Society	10 国際会議録 Requirements of future measurement equipment for silicon wafers Wagner,P., Gerber,H.A., Schmolke,R., Velten,R. SPIE-The International Society for Optical Engineering
5 国際会議録 Discrimination of defects on epitaxial silicon wafers Passek, F., Schmolke, R., Lambert, U., Puppe, G., Wagner, P. Electrochemical Society	11 国際会議録 Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH! Schmolke,R., Blietz,M., Schauer,R., Zemke,D., Oelkrug,H., Ammon,W.v., Lambert,U., Graf,D. Electrochemical Society, SPIE-The International Society for Optical Engineering
6 国際会議録 Discrimination of Defects on Silicon Wafers by Their Light Scattering Behaviour Passek, F., Piontek, H., Luger, A., Wagner, P. Electrochemical Society	12 国際会議録 SILICON SURFACE TREATMENTS AND THEIR IMPACT ON CHEMICAL COMPOSITION AND MORPHOLOGY Graf, Dieter, Brohl, Michael, Bauer-Mayer, Susanne, Ehlert, Andreas, Wagner, Peter, Schnegg, Anton MRS - Materials Research Society

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