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Optical and Electrical Characterization Study of SiCl4 Reactive-Io-Etched GaAs

著者名:
Murtagh, M.
Ye, Shu-Ren
Masterson, H. J.
Beechinor, J. T.
Crean, G. M.
Auret, F. D.
Deenapanray, P. N. K.
Mayer, W. E.
Goodman, S. A.
Myburg, G.
さらに 5 件
掲載資料名:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
442
発行年:
1997
開始ページ:
75
出版情報:
Pittsburgh, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993464 [1558993460]
言語:
英語
請求記号:
M23500/442
資料種別:
国際会議録

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