TEM INVESTIGATION OF HYDROGEN IMPLANTED AND LASER ANNEALED SILICON

TEM INVESTIGATION OF HYDROGEN IMPLANTED AND LASER ANNEALED SILICON

著者名:

掲載資料名:

Microstructure of irradiated materials : Symposium held November 29-1 December, 1994, Boston, Massachusetts USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

373

発行年:

1995

開始ページ:

493

出版情報:

Pittsburgh, Pa: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992757 [1558992758]

言語:

英語

請求記号:

M23500/373

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019369
シリーズID:	PA00000011
会議名:	Symposium on microstructure of irradiated materials
回次:	1994
会議開催地:	Boston, MA, USA
会議開催年:	1994.11.29-1994.12.01

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