CHEMICAL BEAM EPITAXIAL GROWTH OF GaP and InP USING ALTERNATIVE SAFER PRECURSORS
- 著者名:
Sadwick, L. P. Kim, C. W. Ryu, H. H. Hill, C. W. Stringfellow, G. B. Gedridge, R. W., Jr. Jones, A. C. - 掲載資料名:
- Compound semiconductor epitaxy : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 340
- 発行年:
- 1994
- 開始ページ:
- 167
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992405 [1558992405]
- 言語:
- 英語
- 請求記号:
- M23500/340
- 資料種別:
- 国際会議録
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11
国際会議録
DECOMPOSITION MECHANISMS OF ANTIMONY SOURCE COMPOUNDS FOR ORGANOMETALLIC VAPOR-PHASE EPITAXY
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