In-line electrical probe for CD metrology

In-line electrical probe for CD metrology

著者名:

Chain,E.E. ( Motorola )
Griswold,M.D.

掲載資料名:

Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2876

発行年:

1996

開始ページ:

135

終了ページ:

146

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422743 [0819422746]

言語:

英語

請求記号:

P63600/2876

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019346
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.16-1996.10.17

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