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Effect of CH4/H2 ECR plasma etching on the electrical properties of p-type Hg1-x Cdx Te

著者名:
掲載資料名:
Infrared detectors for remote sensing : physics, materials, and devices : 8-9 August 1996, Denver, Colorado
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2816
発行年:
1996
開始ページ:
98
終了ページ:
105
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422040 [0819422045]
言語:
英語
請求記号:
P63600/2816
資料種別:
国際会議録

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