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Residual stress,composition,and optical properties of SiOxNy thin films deposited by dual ion beam sputtering

著者名:
Robic,J.Y. ( LETI/CEA/DOPT )
Leplan,H.
Berger,M.
Chaton,P.
Quesnel,E.
Lartigue,O.
Pelle,C.
Pauleau,Y.
Pierre,F.
さらに 4 件
掲載資料名:
Developments in optical component coatings : 15-16 May, 1996, Glasgow, Scotland, UK
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2776
発行年:
1996
開始ページ:
381
終了ページ:
391
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421616 [0819421618]
言語:
英語
請求記号:
P63600/2776
資料種別:
国際会議録

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