Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol
- 著者名:
Migitaka,S. ( Hitachi,Ltd. ) Uchino,S. Ueno,T. Yamamoto,J. Kojima,K. Hashimoto,M. Shiraishi,H. - 掲載資料名:
- Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2724
- 発行年:
- 1996
- 開始ページ:
- 613
- 終了ページ:
- 619
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421005 [0819421006]
- 言語:
- 英語
- 請求記号:
- P63600/2724
- 資料種別:
- 国際会議録
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