Lithographic performance of an environmentally stable chemically amplified photoresist(ESCAP)
- 著者名:
Conley,W.E. ( IBM Microelectronics ) Breyta,G. Brunsvold,W.R. DiPietro,R.A. Hofer,D.C. Holmes,S.J. Ito,H. Nunes,R. Fichtl,G. Hagerty,P. Thackeray,J.W. - 掲載資料名:
- Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2724
- 発行年:
- 1996
- 開始ページ:
- 34
- 終了ページ:
- 60
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421005 [0819421006]
- 言語:
- 英語
- 請求記号:
- P63600/2724
- 資料種別:
- 国際会議録
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